HOME > Article > DetailIon beam synthesis of SiC thin filmsShunichi Hishita. Journal of Electroceramics 24 [2] 97-103. 2010.https://doi.org/10.1007/s10832-008-9540-0 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at :2016-05-24 16:23:30 +0900 Updated at :2022-09-05 12:58:21 +0900