In-situ Observation of Focused Ion Beam micromilled Si,SiO2 and GaAs
(集束イオンビーム加工したSi, SiO2, GaAsのその場観察)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-11-15 00:39:20 +0900Updated at: 2022-11-15 00:39:20 +0900